Error Mapping

1D/2D/3D geometric error compensation from a calibration map

Correct systematic mechanical inaccuracy by mapping measured position error against a calibration reference such as a laser interferometer, then compensating it in real time. 1D, 2D and 3D maps remove straightness, orthogonality and flatness errors on the fly, so a lower-cost stage reaches tighter accuracy. The same map also corrects Position Event trigger locations.