Wafer Scanning
Constant-velocity scanning for wafer inspection and metrology
Wafer inspection and metrology tools scan the wafer under an optical or sensor head at constant velocity with nanometer-class tracking. Agito controllers hold tight velocity stability and settling so every scan line is captured cleanly.
应用示意
为何选择 Agito
Constant-velocity tracking
Ultra-Precision Mode and 16 kHz loops hold steady scan velocity with minimal tracking error.
Position-synchronized capture
Trigger sensors and cameras at exact positions with hardware position-event output.
Error mapping
1D / 2D / 3D error compensation improves stage accuracy across the wafer.
解决方案与系统配置
AGM800 with Central-i amplifiers, or AGD301 for compact stages, driving the scan and step axes. [Full application brochure material to be supplied.]